一、范围

本标准规定了电子工业用氧的技术要求，试验方法及包装、标志、贮运及安全。

本标准适用于以深冷法、电解法提取的气态或液态氧，以及经纯化方法得到的氧。它们主要用于二氧化硅化学气相淀积，用作氧化源和生产高纯水的反应剂，用于等离子体蚀刻和剥离、光导纤维。

名称：脱氧柱

规格：2m*4mm（内径）

材质：不锈钢/玻璃

粒度：400um-800um

型号：401脱氧剂

应用：GB/T 14605-1993 氧气中微量氩、氮和氪的测定 气相色谱法

适用于安捷伦6890,7890,7820,6890,5890,4890,8860,8890

岛津GC-14C，GC-2010，GC-2014，GC-2018，GC-2030

赛默飞1310系列，布鲁克，PE，磐诺，北分瑞利，东西电子，天瑞，天美，福立，川仪等

GB/T 14604-2009 电子工业用气体氧氩分离脱氧柱  图片：



GB/T 14604-2009 Gas Oxygen Argon Separation Deoxygenation Column for Electronic Industry
GB/T 14604-2009 Electronic Industry Gas Oxygen Argon Separation Deoxygenation Column Details:
Electronic industry gases GBT 14604-2009 Electronic industry gases oxygen
1、 Scope
This standard specifies the technical requirements, testing methods, packaging, labeling, storage, transportation, and safety of oxygen used in the electronic industry.
This standard applies to gaseous or liquid oxygen extracted by cryogenic or electrolytic methods, as well as oxygen obtained by purification methods. They are mainly used for silicon dioxide chemical vapor deposition, as oxidation sources and reactants for producing high-purity water, for plasma etching and stripping, and for optical fibers.
Name: Deoxygenation Column
Specification: 2m * 4mm (inner diameter)
Material: Stainless Steel/Glass
Particle size: 400um-800um
Model: 401 Deoxidizer
Application: GB/T 14605-1993 Determination of Trace Argon, Nitrogen, and Krypton in Oxygen Gas Chromatography Method